"Automated Nanomanipulation for Repairing Defects on Nanoimprint ..."

Siyuan Meng et al. (2025)

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DOI: 10.1109/TASE.2025.3564616

access: closed

type: Journal Article

metadata version: 2025-06-11

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Siyuan Meng, Jiankang Jiang, Fubo Wang, Junhui Zhu, Qianjun Zhang, Yong Wang, Wei Dong, Changhai Ru:
Automated Nanomanipulation for Repairing Defects on Nanoimprint Lithography Masters. IEEE Trans Autom. Sci. Eng. 22: 14967-14975 (2025)

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