"An SEM-Based Nanomanipulation System for Multiphysical Characterization of ..."

Juntian Qu et al. (2023)

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DOI: 10.1109/TASE.2022.3146486

access: closed

type: Journal Article

metadata version: 2024-04-09

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Juntian Qu, Renjie Wang, Peng Pan, Linghao Du, Zetian Mi, Yu Sun, Xinyu Liu:
An SEM-Based Nanomanipulation System for Multiphysical Characterization of Single InGaN/GaN Nanowires. IEEE Trans Autom. Sci. Eng. 20(1): 233-243 (2023)

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