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"A Run-to-Run Profile Control Algorithm for Improving the Flatness of ..."

Xin Wang, Su Wu, Kaibo Wang (2015)

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DOI: 10.1109/TASE.2013.2284935

access: closed

type: Journal Article

metadata version: 2020-04-02

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Xin Wang, Su Wu, Kaibo Wang:
A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products. IEEE Trans Autom. Sci. Eng. 12(1): 192-203 (2015)

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