"Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm ..."

WenQing Xiong et al. (2021)

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DOI: 10.1109/TASE.2020.3014078

access: closed

type: Journal Article

metadata version: 2025-11-07

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WenQing Xiong, ChunRong Pan, Yan Qiao, Naiqi Wu, Mingxin Chen, PinHui Hsieh:
Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools. IEEE Trans Autom. Sci. Eng. 18(4): 1653-1667 (2021)

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