"Non-Cyclic Scheduling of Single-Armed Cluster Tools for Processing Two ..."

Fajun Yang et al. (2025)

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DOI: 10.1109/TASE.2025.3554273

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type: Journal Article

metadata version: 2025-06-11

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Fajun Yang, Xiang Xu, Zhiyuan Yang, Chao Li, Lu Zhen, Naiqi Wu:
Non-Cyclic Scheduling of Single-Armed Cluster Tools for Processing Two Wafer Types. IEEE Trans Autom. Sci. Eng. 22: 14133-14146 (2025)

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