"Adaptive mesh refinement for multilayer process simulation using the ..."

Bruno Baccus, Dominique Collard, Emmanuel Dubois (1992)

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DOI: 10.1109/43.124426

access: closed

type: Journal Article

metadata version: 2020-09-24

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Bruno Baccus, Dominique Collard, Emmanuel Dubois:
Adaptive mesh refinement for multilayer process simulation using the finite element method. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 11(3): 396-403 (1992)

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