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"Mask Assignment and DSA Grouping for DSA-MP Hybrid Lithography for Sub-7 ..."

Yasmine Badr, Andres Torres, Puneet Gupta (2017)

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DOI: 10.1109/TCAD.2016.2614262

access: closed

type: Journal Article

metadata version: 2021-10-28

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  - https://dblp.org/rec/journals/tcad/BadrTG17
Yasmine Badr, Andres Torres, Puneet Gupta:
Mask Assignment and DSA Grouping for DSA-MP Hybrid Lithography for Sub-7 nm Contact/Via Holes. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 36(6): 913-926 (2017)

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