"Novel algorithms for placement of rectangular covers for mask inspection ..."

Kanad Chakraborty, Alexey Lvov, Maharaj Mukherjee (2006)

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DOI: 10.1109/TCAD.2005.853710

access: closed

type: Journal Article

metadata version: 2020-09-24

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Kanad Chakraborty, Alexey Lvov, Maharaj Mukherjee:
Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 25(1): 79-91 (2006)

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