"Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy ..."

Chunyang Feng et al. (2011)

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DOI: 10.1109/TCAD.2010.2088030

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type: Journal Article

metadata version: 2023-08-16

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Chunyang Feng, Hai Zhou, Changhao Yan, Jun Tao, Xuan Zeng:
Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 30(3): 402-415 (2011)

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