"Reverse short-channel effect due to lateral diffusion of point-defect ..."

Tatsuya Kunikiyo et al. (1994)

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DOI: 10.1109/43.275360

access: closed

type: Journal Article

metadata version: 2020-09-24

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Tatsuya Kunikiyo, Katsuyoshi Mitsui, Masato Fujinaga, Tetsuya Uchida, Norihiko Kotani:
Reverse short-channel effect due to lateral diffusion of point-defect induced by source/drain ion implantation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13(4): 507-514 (1994)

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