"Efficient mixed-domain analysis of electrostatic MEMS."

Gang Li, Narayan R. Aluru (2003)

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DOI: 10.1109/TCAD.2003.816210

access: closed

type: Journal Article

metadata version: 2020-10-26

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Gang Li, Narayan R. Aluru:
Efficient mixed-domain analysis of electrostatic MEMS. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22(9): 1228-1242 (2003)

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