"A general numerical procedure for multilayer multistep IC process simulation."

M. Karim Moallemi, Hui Zhang (1994)

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DOI: 10.1109/43.329266

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type: Journal Article

metadata version: 2020-09-24

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M. Karim Moallemi, Hui Zhang:
A general numerical procedure for multilayer multistep IC process simulation. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13(11): 1379-1390 (1994)

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