"Modeling phosphorus diffusion in three dimensions."

Walter B. Richardson, Graham F. Carey, Brian J. Mulvaney (1992)

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DOI: 10.1109/43.125096

access: closed

type: Journal Article

metadata version: 2020-09-24

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Walter B. Richardson, Graham F. Carey, Brian J. Mulvaney:
Modeling phosphorus diffusion in three dimensions. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 11(4): 487-496 (1992)

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