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"An efficient volume-removal algorithm for practical three-dimensional ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Edward W. Scheckler et al. (1993)

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DOI: 10.1109/43.240082

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - journals/tcad/SchecklerTPN93
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  - https://dblp.org/rec/journals/tcad/SchecklerTPN93
Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther:
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12(9): 1345-1356 (1993)

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