"Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based ..."

Hao-Chiang Shao et al. (2023)

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DOI: 10.1109/TCAD.2022.3192175

access: closed

type: Journal Article

metadata version: 2023-03-11

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Hao-Chiang Shao, Hsing-Lei Ping, Kuo-Shiuan Chen, Weng-Tai Su, Chia-Wen Lin, Shao-Yun Fang, Pin-Yian Tsai, Yan-Hsiu Liu:
Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(3): 1000-1014 (2023)

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