"Physically rigorous modeling of internal laser-probing techniques for ..."

Robert K. Thalhammer, Gerhard K. M. Wachutka (2004)

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DOI: 10.1109/TCAD.2003.819895

access: closed

type: Journal Article

metadata version: 2020-09-24

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Robert K. Thalhammer, Gerhard K. M. Wachutka:
Physically rigorous modeling of internal laser-probing techniques for microstructured semiconductor devices. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 23(1): 60-70 (2004)

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