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"An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for ..."
Yang-Shan Tong, Sao-Jie Chen (2010)
- Yang-Shan Tong, Sao-Jie Chen
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An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 29(5): 671-684 (2010)
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