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"Anisotropic Mesh Refinement for the Simulation of Three-Dimensional ..."
W. Wessner et al. (2006)
- W. Wessner, Johann Cervenka
, Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr
:
Anisotropic Mesh Refinement for the Simulation of Three-Dimensional Semiconductor Manufacturing Processes. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 25(10): 2129-2139 (2006)
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