"Efficient Proximity Effect Correction Using Fast Multipole Method With ..."

Wenze Yao et al. (2023)

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DOI: 10.1109/TCAD.2022.3171441

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type: Journal Article

metadata version: 2023-01-15

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Wenze Yao, Haojie Zhao, Chengyang Hou, Wei Liu, Hongcheng Xu, Xin Zhang, Jing Xiao, Jie Liu:
Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(1): 218-228 (2023)

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