"pFed-Litho: Lithography Modeling With a Personalized Federated ..."

Qing Zhang et al. (2025)

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DOI: 10.1109/TCAD.2024.3513264

access: closed

type: Journal Article

metadata version: 2025-07-06

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Qing Zhang, Yuhang Zhang, Rui Chen, Wei Lu, Huajie Huang, Zhiqiang Li, Yongfu Li:
pFed-Litho: Lithography Modeling With a Personalized Federated Learning-Based Framework. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 44(6): 2264-2276 (2025)

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