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"Deep Learning-Driven Simultaneous Layout Decomposition and Mask Optimization."

Wei Zhong et al. (2022)

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DOI: 10.1109/TCAD.2021.3061494

access: closed

type: Journal Article

metadata version: 2022-03-15

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  - https://dblp.org/rec/journals/tcad/ZhongHMYMY22
Wei Zhong, Shuxiang Hu, Yuzhe Ma, Haoyu Yang, Xiuyuan Ma, Bei Yu:
Deep Learning-Driven Simultaneous Layout Decomposition and Mask Optimization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 41(3): 709-722 (2022)

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