"System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, ..."

Rong-Fong Fung, Wang-Chi Lin (2010)

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DOI: 10.1109/TCST.2008.2009528

access: closed

type: Journal Article

metadata version: 2020-06-08

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Rong-Fong Fung, Wang-Chi Lin:
System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table. IEEE Trans. Control. Syst. Technol. 18(1): 22-34 (2010)

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