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"Generalized Predictive Control of Temperature on an Atomic Layer ..."

Wenjie He et al. (2015)

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DOI: 10.1109/TCST.2015.2404898

access: closed

type: Journal Article

metadata version: 2022-11-17

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Wenjie He, Hai-Tao Zhang, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen:
Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor. IEEE Trans. Control. Syst. Technol. 23(6): 2408-2415 (2015)

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