"Multiplexed MPC for Multizone Thermal Processing in Semiconductor ..."

Keck Voon Ling et al. (2010)

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DOI: 10.1109/TCST.2009.2036155

access: closed

type: Journal Article

metadata version: 2020-06-15

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Keck Voon Ling, Weng Khuen Ho, Bing Fang Wu, Andreas Lo, Han Yan:
Multiplexed MPC for Multizone Thermal Processing in Semiconductor Manufacturing. IEEE Trans. Control. Syst. Technol. 18(6): 1371-1380 (2010)

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