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"Identifying Position-Dependent Mechanical Systems: A Modal Approach ..."

Robbert Voorhoeve et al. (2021)

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DOI: 10.1109/TCST.2020.2974140

access: closed

type: Journal Article

metadata version: 2021-03-02

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  - https://dblp.org/rec/journals/tcst/VoorhoeveRAO21
Robbert Voorhoeve, Robin de Rozario, Wouter H. T. M. Aangenent, Tom Oomen:
Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage. IEEE Trans. Control. Syst. Technol. 29(1): 194-206 (2021)

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