"LithoPW: Leveraging Visual Memory Encoding and Defect-Aware Optimization ..."

Jiwei Shen, Shujing Lyu, Yue Lu (2024)

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DOI: 10.1109/TCSVT.2024.3395274

access: closed

type: Journal Article

metadata version: 2024-11-30

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Jiwei Shen, Shujing Lyu, Yue Lu:
LithoPW: Leveraging Visual Memory Encoding and Defect-Aware Optimization for Precise Determination of the Lithography Process Windows. IEEE Trans. Circuits Syst. Video Technol. 34(10): 9298-9310 (2024)

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