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"Simulation and evolutionary optimization of electron-beam lithography with ..."
Franck Robin et al. (2003)
- Franck Robin, Andrea Orzati, Esteban Moreno Soriano, Otte Jakob Homan, Werner Bächtold:
Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms. IEEE Trans. Evol. Comput. 7(1): 69-82 (2003)
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