"Linear Modeling and Control of Comb-Actuated Resonant MEMS Mirror With ..."

David Brunner, Han Woong Yoo, Georg Schitter (2021)

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DOI: 10.1109/TIE.2020.2982124

access: closed

type: Journal Article

metadata version: 2021-01-09

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David Brunner, Han Woong Yoo, Georg Schitter:
Linear Modeling and Control of Comb-Actuated Resonant MEMS Mirror With Nonlinear Dynamics. IEEE Trans. Ind. Electron. 68(4): 3315-3323 (2021)

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