"Data-Based Iterative Tuning of Feedforward Control With Disturbance ..."

Taotao Chen et al. (2025)

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DOI: 10.1109/TIE.2025.3544197

access: closed

type: Journal Article

metadata version: 2025-09-11

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Taotao Chen, Cuiping Yuan, Min Li, Xiaoyi Huang, Kun Li:
Data-Based Iterative Tuning of Feedforward Control With Disturbance Compensation for Dual-Drive Gantry Stages in Wafer Inspection. IEEE Trans. Ind. Electron. 72(9): 9624-9634 (2025)

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