"Robust Model-Predictive Control for Inductively Coupled Plasma Generation ..."

Junjie Wang et al. (2021)

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DOI: 10.1109/TIE.2020.2978720

access: closed

type: Journal Article

metadata version: 2025-01-13

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Junjie Wang, Yanming Liu, Xiaotao Liu, Xiaoping Li, Haojie Zhang, Di Wang:
Robust Model-Predictive Control for Inductively Coupled Plasma Generation With a Semiphysical Simulation. IEEE Trans. Ind. Electron. 68(4): 3380-3389 (2021)

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