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"Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric ..."

Guoqiang Wu et al. (2018)

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DOI: 10.1109/TIE.2017.2748041

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - https://dblp.org/rec/journals/tie/WuXZWYLZLG18
Guoqiang Wu, Jinghui Xu, Xiaolin Zhang, Nan Wang, Danlei Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Yuandong Gu:
Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications. IEEE Trans. Ind. Electron. 65(4): 3576-3584 (2018)

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