"Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI ..."

Guoqiang Wu et al. (2020)

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DOI: 10.1109/TIE.2019.2959966

access: closed

type: Journal Article

metadata version: 2020-08-05

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Guoqiang Wu, Jinghui Xu, Xiaolin Zhang, Nan Wang, Danlei Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Yuandong Gu:
Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications". IEEE Trans. Ind. Electron. 67(11): 9976 (2020)

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