"Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage ..."

Shunli Xiao, Yangmin Li (2013)

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DOI: 10.1109/TIE.2012.2209613

access: closed

type: Journal Article

metadata version: 2020-06-10

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Shunli Xiao, Yangmin Li:
Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators. IEEE Trans. Ind. Electron. 60(10): 4613-4626 (2013)

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