"CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, ..."

Wei Xu et al. (2021)

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DOI: 10.1109/TIE.2020.2984446

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type: Journal Article

metadata version: 2025-08-16

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Wei Xu, Xiaoyi Wang, Ruijie Wang, Izhar, Jingcui Xu, Yi-Kuen Lee:
CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application. IEEE Trans. Ind. Electron. 68(5): 4468-4476 (2021)

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