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"Piezoelectric-Piezoresistive Coupling MEMS Sensors for Measurement of ..."
Fen Xue et al. (2020)
- Fen Xue

, Jun Hu, Yue Guo
, Guowei Han, Yong Ouyang, Shan X. Wang, Jinliang He
:
Piezoelectric-Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range. IEEE Trans. Ind. Electron. 67(1): 551-559 (2020)

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