"Development of a High-Performance Microaccelerometer With Position ..."

Mingzhi Yu et al. (2023)

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DOI: 10.1109/TIE.2022.3217599

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type: Journal Article

metadata version: 2023-11-10

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Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang:
Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams. IEEE Trans. Ind. Electron. 70(8): 8546-8556 (2023)

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