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"Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor ..."

Fei Tan et al. (2015)

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DOI: 10.1109/TII.2015.2490039

access: closed

type: Journal Article

metadata version: 2020-05-21

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Fei Tan, Tianhong Pan, Zhengming Li, Shan Chen:
Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes. IEEE Trans. Ind. Informatics 11(6): 1435-1444 (2015)

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