"Effects of Thermal Drifts on the Calibration of Capacitive Displacement ..."

Kamelia Bouderbala et al. (2015)

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DOI: 10.1109/TIM.2015.2440563

access: closed

type: Journal Article

metadata version: 2020-06-08

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Kamelia Bouderbala, Hichem Nouira, Manuel Girault, Etienne Videcoq, José Antonio Salgado:
Effects of Thermal Drifts on the Calibration of Capacitive Displacement Probes at the Nanometer Level of Accuracy. IEEE Trans. Instrum. Meas. 64(11): 3062-3074 (2015)

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