"A Versatile Instrument for the Characterization of Capacitive Micro- and ..."

Cesare Buffa, Alessandro Tocchio, Giacomo Langfelder (2012)

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DOI: 10.1109/TIM.2012.2182866

access: closed

type: Journal Article

metadata version: 2020-06-08

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Cesare Buffa, Alessandro Tocchio, Giacomo Langfelder:
A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems. IEEE Trans. Instrum. Meas. 61(7): 2012-2021 (2012)

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