"Achieving the Defect Transfer Detection of Semiconductor Wafer by a Novel ..."

Jiangtao Cheng et al. (2024)

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DOI: 10.1109/TIM.2023.3334368

access: closed

type: Journal Article

metadata version: 2024-01-13

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Jiangtao Cheng, Guojun Wen, Xin He, Xingyue Liu, Yang Hu, Shuang Mei:
Achieving the Defect Transfer Detection of Semiconductor Wafer by a Novel Prototype Learning-Based Semantic Segmentation Network. IEEE Trans. Instrum. Meas. 73: 1-12 (2024)

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