"Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures ..."

Michael W. Cresswell et al. (2008)

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DOI: 10.1109/TIM.2007.908313

access: closed

type: Journal Article

metadata version: 2020-06-08

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Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Christine E. Murabito, Ronald G. Dixson, Amy Hunt:
Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm. IEEE Trans. Instrum. Meas. 57(1): 100-109 (2008)

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