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"Optical deflection measurement for characterization of ..."
Samara L. Firebaugh et al. (2004)
- Samara L. Firebaugh, Harry K. Charles Jr., R. L. Edwards, A. C. Keeney, S. F. Wilderson:
Optical deflection measurement for characterization of microelectromechanical systems (MEMS). IEEE Trans. Instrum. Meas. 53(4): 1047-1051 (2004)
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