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"Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone."
Yanan Geng et al. (2023)
- Yanan Geng, Weirong Ren, Guojun Zhang, Peng Chen, Shan Zhu, Yifan Zhang, Yan Liu, Li Jia, Jie Zhang, Yansong Wang, Wendong Zhang:
Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone. IEEE Trans. Instrum. Meas. 72: 1-8 (2023)
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