"Range-Extended Confocal Chromatic Sensor System for Double-Sided ..."

Christian Haider et al. (2022)

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DOI: 10.1109/TIM.2022.3216679

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type: Journal Article

metadata version: 2022-12-05

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Christian Haider, Martin E. Fuerst, Matthias Laimer, Ernst Csencsics, Georg Schitter:
Range-Extended Confocal Chromatic Sensor System for Double-Sided Measurement of Optical Components With High Lateral Resolution. IEEE Trans. Instrum. Meas. 71: 1-8 (2022)

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