"Backside Thermal Fault Localization Using Laser Scanning Confocal ..."

Donguk Kim et al. (2020)

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DOI: 10.1109/TIM.2019.2925248

access: closed

type: Journal Article

metadata version: 2020-06-16

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Donguk Kim, Jung Dae Kim, Ilkyu Han, Chan Bae Jeong, Kye-Sung Lee, Hwan Hur, Ki-Hwan Nam, Ji-Yong Bae, I Jong Kim, Ki Soo Chang:
Backside Thermal Fault Localization Using Laser Scanning Confocal Thermoreflectance Microscopy Based on Auto-Balanced Detection. IEEE Trans. Instrum. Meas. 69(6): 2914-2923 (2020)

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