"Cross-Scale Positioning of Three Degree-of-Freedom Planar Motions With ..."

Jiyu Li et al. (2025)

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DOI: 10.1109/TIM.2025.3589699

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type: Journal Article

metadata version: 2025-09-11

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Jiyu Li, Tao Chen, Shusheng Bi, Yuliang Wang:
Cross-Scale Positioning of Three Degree-of-Freedom Planar Motions With Subnanometer Resolution Using an Encoded Pattern. IEEE Trans. Instrum. Meas. 74: 1-13 (2025)

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