"A High-Accuracy Ultrasonic Gas Flowmeter Based on Scandium-Doped Aluminum ..."

Hanzhe Liu et al. (2024)

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DOI: 10.1109/TIM.2024.3481593

access: closed

type: Journal Article

metadata version: 2024-11-30

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Hanzhe Liu, Xiangyang Wang, Chongbin Liu, Yuzhe Lin, Lujiang Zhang, Hui Zhao, Xiaofei Cui, Jianke Feng, Guoqiang Wu, Jifang Tao:
A High-Accuracy Ultrasonic Gas Flowmeter Based on Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers. IEEE Trans. Instrum. Meas. 73: 1-10 (2024)

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