"Use of Two Planar Gratings to Measure 3-DOF Displacements of Planar Moving ..."

Yongmeng Liu et al. (2015)

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DOI: 10.1109/TIM.2014.2329742

access: closed

type: Journal Article

metadata version: 2020-06-08

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Yongmeng Liu, Maoqiang Yuan, Jieru Cao, Jiwen Cui, Jiubin Tan:
Use of Two Planar Gratings to Measure 3-DOF Displacements of Planar Moving Stage. IEEE Trans. Instrum. Meas. 64(1): 163-169 (2015)

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