"Thickness Measurement of Metallic Film Based on a High-Frequency Feature ..."

Mingyang Lu et al. (2021)

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DOI: 10.1109/TIM.2020.3027929

access: closed

type: Journal Article

metadata version: 2020-12-17

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  - https://dblp.org/rec/journals/tim/LuCMHPY21
Mingyang Lu, Liming Chen, Xiaobai Meng, Ruochen Huang, Anthony J. Peyton, Wuliang Yin:
Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor. IEEE Trans. Instrum. Meas. 70: 1-8 (2021)

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