"Interferometric Measurement of the Diameter of a Silicon Sphere With a ..."

Zhiyong Luo et al. (2010)

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DOI: 10.1109/TIM.2010.2047043

access: closed

type: Journal Article

metadata version: 2020-06-08

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Zhiyong Luo, Yingzi Gu, Jitao Zhang, Lifeng Yang, Ligong Guo:
Interferometric Measurement of the Diameter of a Silicon Sphere With a Mechanical Scanning Method. IEEE Trans. Instrum. Meas. 59(11): 2991-2996 (2010)

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